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Reduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometry
Zitatschlüssel Chavez-Angel2014
Autor Chavez-Angel, E. and Reparaz, J. S. and Gomis-Bresco, J. and Wagner, M. R. and Cuffe, J. and Graczykowski, B. and Shchepetov, A. and Jiang, H. and Prunnila, M. and Ahopelto, J. and Alzina, F. and Sotomayor Torres, C. M.
Seiten 012113
Jahr 2014
Journal APL Materials
Jahrgang 2
Nummer 1
Monat jan
Zusammenfassung We report on the reduction of the thermal conductivity in ultra-thin suspended Si membranes with high crystalline quality. A series of membranes with thicknesses ranging from 9 nm to 1.5 μm was investigated using Raman thermometry, a novel contactless technique for thermal conductivity determination. A systematic decrease in the thermal conductivitywas observed as reducing the thickness, which is explained using the Fuchs-Sondheimer model through the influence of phonon boundary scattering at the surfaces. The thermal conductivity of the thinnest membrane with d = 9 nm resulted in (9 ± 2) W/mK, thus approaching the amorphous limit but still maintaining a high crystalline quality.
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